微分位相コントラストSTEMを用いたGaN/AlGaN/InGaNマルチヘテロ接合の局所電場観察
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The local electric field distributions inside specimens can be directly observed by differential-phase-contrast scanning transmission electron microscopy (DPC STEM). In this study, we applied DPC STEM to GaN/AlGaN/InGaN multi-heterostructures. We successfully visualized the differences in electrostatic potentials of GaN/AlGaN/InGaN.